High temperature stability and relaxation of UHV/CVD SiGe thin films
- S. Stiffler
- Carol Stanis
- et al.
- 1992
- MRS Fall Meeting 1992
Publications
Date
Featured collections
Popular topics
22 results for M.S. Goorsky
Photoluminescence from pseudomorphically strained Si/Si1-xGex multiple quantum wells grown on silicon
- Stefan Zollner
- R.T. Collins
- et al.
- 1992
- SPIE Semiconductors 1992
Strain relaxation in GeSi layers with uniform and graded composition
- S.C. Jain
- P. Balk
- et al.
- 1991
- ESSDERC 1991
Epitaxial Growth and Selectivity of AlxGa1-xAs Using Novel Metalorganic Precursors
- M.S. Goorsky
- T.F. Kuech
- et al.
- 2019
- JES
Nondestructive analysis of structural defects in wide bandgap II-VI heterostructures
- M.S. Goorsky
- S.E. Lindo
- et al.
- 1996
- Journal of Electronic Materials
Heavy arsenic doping of silicon grown by atmospheric-pressure chemical vapor deposition at low temperatures
- P. Agnello
- T.O. Sedgwick
- et al.
- 1992
- Applied Physics Letters
Thermal stability of Si1-xCx/Si strained layer superlattices
- M.S. Goorsky
- Subramanian S. Iyer
- et al.
- 1992
- Applied Physics Letters
The role of dislocation-dislocation interactions in the relaxation of pseudomorphically strained semiconductors. I. Theory
- S. Stiffler
- Carol Stanis
- et al.
- 1992
- Journal of Applied Physics
Synthesis of Si1-yCy alloys by molecular beam epitaxy
- Subramanian S. Iyer
- K. Eberl
- et al.
- 1992
- Applied Physics Letters
The role of dislocation-dislocation interactions in the relaxation of pseudomorphically strained semiconductors. II. Experiment-The high-temperature relaxation of ultrahigh-vacuum chemical-vapor-deposited SiGe thin films
- S. Stiffler
- Carol Stanis
- et al.
- 1992
- Journal of Applied Physics