High resolution profiling using ion scattering and resonant nuclear reactions
- R.P. Pezzi
- R.M. Wallace
- et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
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13 results for R.P. Pezzi
Interaction of SiC thermal oxidation by-products with SiO2
- C. Radtke
- F.C. Stedile
- et al.
- 2008
- Applied Physics Letters
Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
- R.P. Pezzi
- C. Krug
- et al.
- 2008
- Applied Physics Letters
Nuclear reaction analysis of 1H and 2H in hafnium silicate films on Si
- C. Driemeier
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Post deposition annealing of Hf aluminate films on Si investigated by ion backscattering and nuclear reaction analyses
- L. Miotti
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Advanced ion energy loss models: Applications to subnanometric resolution elemental depth profiling
- R.P. Pezzi
- P.L. Grande
- et al.
- 2007
- Surface Science
An analytical energy-loss line shape for high depth resolution in ion-beam analysis
- P.L. Grande
- A. Hentz
- et al.
- 2007
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Atomic transport and integrity of Al2O3(2.0 nm)/HfO2(2.5 nm) gate stacks on Si
- L. Miotti
- R.P. Pezzi
- et al.
- 2007
- Applied Physics Letters
Oxygen transport and reaction mechanisms in rhenium gate contacts on hafnium oxide films on Si
- R.P. Pezzi
- M. Copel
- et al.
- 2006
- Applied Physics Letters
Effect of oxide overlayer formation on the growth of gold catalyzed epitaxial silicon nanowires
- Hemanth Jagannathan
- Yoshio Nishi
- et al.
- 2006
- Applied Physics Letters