A Manufacturing grade, porous oxycarbosilane spin-on dielectric candidate with K 2.0
- Willi Volksen
- Teddie P. Magbitang
- et al.
- 2011
- JES
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156 results for Willi Volksen
Application of the protection/deprotection strategy to the science of porous materials
- Theo Frot
- Willi Volksen
- et al.
- 2011
- Advanced Materials
Low dielectric constant materials
- Willi Volksen
- Robert D. Miller
- et al.
- 2009
- Chemical Reviews
Effect of porogen molecular architecture and loading on structure of porous thin films
- Hae-Jeong Lee
- Christopher L. Soles
- et al.
- 2008
- Chemistry of Materials
Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES
Molecular-controlled fracture and release of templated nanoporous organosilicate thin films
- Markus D. Ong
- Willi Volksen
- et al.
- 2008
- Advanced Materials
Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- A.A. Lubguban
- J.A. Lubguban
- et al.
- 2008
- Thin Solid Films
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Geraud Dubois
- Willi Volksen
- et al.
- 2008
- Journal of Sol-Gel Science and Technology
Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Willi Volksen
- Geraud Dubois
- et al.
- 2007
- VMIC 2007
Effects of environment on modulus of low-k porous films used in back end of line
- Eva E. Simonyi
- Christos D. Dimitrakopoulos
- et al.
- 2007
- MRS Spring Meeting 2007