Phase formation and stability of Ni silicide contacts - Scaling to ultra-thin films
- C. Detavernier
- K. De Keyser
- et al.
- 2010
- ICSICT 2010
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15 results for K. De Keyser
Texture in thin film silicides and germanides: A review
- B. De Schutter
- K. De Keyser
- et al.
- 2016
- Applied Physics Reviews
On the formation and structural properties of hexagonal rare earth (Y, Gd, Dy, Er and Yb) disilicide thin films
- F.A. Geenen
- W. Knaepen
- et al.
- 2014
- Journal of Alloys and Compounds
Formation and texture of palladium germanides studied by in situ X-ray diffraction and pole figure measurements
- F.A. Geenen
- W. Knaepen
- et al.
- 2014
- Thin Solid Films
Three dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitates
- Simon Gaudet
- Koen De Keyser
- et al.
- 2013
- JVSTA
Phase formation and texture of nickel silicides on Si1-xC x epilayers
- K. De Keyser
- B. De Schutter
- et al.
- 2011
- Microelectronic Engineering
Texture of CoSi2 films on Si(111), (110) and (001) substrates
- K. De Keyser
- C. Detavernier
- et al.
- 2010
- Thin Solid Films
Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
- K. De Keyser
- C. Van Bockstael
- et al.
- 2010
- Applied Physics Letters
Texture of cobalt germanides on Ge(100) and Ge(111) and its influence on the formation temperature
- K. De Keyser
- R.L. Van Meirhaeghe
- et al.
- 2010
- JES
In situ study of the formation of silicide phases in amorphous Co-Si mixed layers
- C. Van Bockstael
- K. De Keyser
- et al.
- 2010
- Microelectronic Engineering