Stress gradients observed in Cu thin films induced by capping layers
- Conal E. Murray
- Paul R. Besser
- et al.
- 2009
- MRS Spring Meeting 2009
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116 results for Conal Murray
Extendibility of NiPt silicide contacts for CMOS technology demonstrated to the 22-nm node
- Kazuya Ohuchi
- Christian Lavoie
- et al.
- 2007
- IEDM 2007
Effects of BEOL stack on thermal mechanical stress of Cu lines
- Seung-Hyun Rhee
- Conal E. Murray
- et al.
- 2006
- MRS Spring Meeting 2006
Systematic characterization of pseudomorphic (110) intrinsic SiGe epitaxial films for hybrid orientation technology with embedded SiGe source/drain
- Qiqing Ouyang
- Anita Madan
- et al.
- 2006
- MRS Spring Meeting 2006
The Taming of the Superconducting Qubit: A Tale of Loss
- 2020
- APS March Meeting 2020
Quasiparticle tunneling as a probe of Josephson junction barrier and capacitor material in superconducting qubits
- C. Kurter
- Conal E. Murray
- et al.
- 2022
- npj Quantum Information
High-resolution three-dimensional structural microscopy by single-angle Bragg ptychography
- Stephan O. Hruszkewycz
- M. Allain
- et al.
- 2016
- Nature Materials
Titanium silicide/titanium nitride full metal gates for dual-channel gate-first CMOS
- Martin M. Frank
- Cyril Cabral
- et al.
- 2016
- IEEE Electron Device Letters
Strain imaging of nanoscale semiconductor heterostructures with x-ray bragg projection ptychography
- Martin V. Holt
- Stephan O. Hruszkewycz
- et al.
- 2014
- Physical Review Letters
High-mobility p-type transistor based on a spin-coated metal telluride semiconductor
- David B. Mitzi
- Matthew Copel
- et al.
- 2006
- Advanced Materials