1 µm MOSFET VLSI Technology: Part VI― Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE JSSC
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38 results for M. Hatzakis
Performance characteristics of diazo-type photoresists under e-beam and optical exposure
- Jane M. Shaw
- Michael Hatzakis
- 1978
- IEEE T-ED
Fabrication and josephson properties of NB3GE
- R.B. Laibowitz
- C.C. Tsuei
- et al.
- 1975
- IEEE Transactions on Magnetics
Electron-beam fabrication of high-density amorphous bubble film devices
- K.Y. Ahn
- T.H.P. Chang
- et al.
- 1975
- IEEE Transactions on Magnetics
An experimental high-density memory array fabricated with electron beam
- H.N. Yu
- R.H. Dennard
- et al.
- 1973
- ISSCC 1973
Electron-Optical Masking of Semiconductor Structures
- Richard F. M. Thornley
- Michael Hatzakis
- et al.
- 1970
- IEEE T-ED
Batch-Fabricated Thin-Film Magnetic Recording Heads
- Lubomyr T. Romankiw
- Ian M. Croll
- et al.
- 1970
- IEEE Transactions on Magnetics
Electron Resists for Microcircuit and Mask Production
- M. Hatzakis
- 1969
- JES