A universal microsectioning technique for diffusion
- D. Gupta
- R.T.C. Tsui
- 2003
- Applied Physics Letters
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Resistivity of rf sputter-thinned aluminum films
- A.F. Mayadas
- R.T.C. Tsui
- et al.
- 2003
- Applied Physics Letters
Calculation of ion bombarding energy and its distribution in rf sputtering
- R.T.C. Tsui
- 1968
- Physical Review