Publications

221 results at Microelectronic Engineering

Comparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- - B. Jacobs
  - H. Zull
  - et al.
- 1993
- Microelectronic Engineering
Early operating experience with the helios compact synchrotron x-ray source
- - D.E. Andrews
  - Chas N. Archie
- 1993
- Microelectronic Engineering
Lateral down-scaling of selective area MOVPE-grown GaInAs/InP wires and dots
- - H. Rothuizen
  - P. Roentgen
  - et al.
- 1993
- Microelectronic Engineering
Carbon impurities at a Si-SiO₂ interface
- - S.I. Raider
- 1993
- Microelectronic Engineering
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- - C. Reeves
  - S.J. Wind
  - et al.
- 1993
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1993
- Microelectronic Engineering
Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering
SiGe-base bipolar transistors for cryogenic BiCMOS applications
- - John D. Cressler
- 1992
- Microelectronic Engineering
Optical analysis of wet chemically etched InGaAs/InP wires
- - B. Jacobs
  - M. Emmerling
  - et al.
- 1992
- Microelectronic Engineering
Overlay measurement using the low voltage scanning electron microscope
- - Michael G. Rosenfield
  - A. Starikov
- 1992
- Microelectronic Engineering