Publications

221 results at Microelectronic Engineering

Electron beam tester measurements of switching noise in VLSI circuits
- - Keith A. Jenkins
  - David F. Heidel
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- - S.J. Wind
  - U. Meirav
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Strain relaxation in GeSi layers with uniform and graded composition
- - S.C. Jain
  - P. Balk
  - et al.
- 1991
- Microelectronic Engineering
X-ray mask distortion due to radiation damage
- - R.E. Acosta
- 1991
- Microelectronic Engineering
Comparison of vapor and liquid phase silylation processes of photoresists
- - E. Babich
  - J. Paraszczak
  - et al.
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering
MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- - Yvan D. Galeuchet
  - Hugo Rothuizen
  - et al.
- 1991
- Microelectronic Engineering
Device design issues for a high-performance technology with Si or SiGe epitaxial base
- - J.N. Burghartz
  - J.D. Cressler
  - et al.
- 1991
- Microelectronic Engineering
Light scattering properties of x-ray lithography mask substrates
- - J.R. Maldonado
  - Y. Vladimirsky
  - et al.
- 1991
- Microelectronic Engineering