Publications

221 results at Microelectronic Engineering

Metrology using differential phase contrast microscopy
- - Jerry C. Shaw
- 1991
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- - Hiroyuki Hiraoka
  - Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
Electron beam tester measurements of switching noise in VLSI circuits
- - Keith A. Jenkins
  - David F. Heidel
- 1991
- Microelectronic Engineering
Periodic conductance resonances in one-dimensional GaAs channels with nanoconstrictions
- - S.J. Wind
  - U. Meirav
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Determination of proximity effect correction parameters for 0.1 μm electron-beam lithography
- - Michael G. Rosenfield
  - S.J. Wind
  - et al.
- 1990
- Microelectronic Engineering
A simple bilayer lift-off process
- - David F. Witman
  - Jane M. Shaw
  - et al.
- 1990
- Microelectronic Engineering
New high resolution and high sensitivity deep UV, x-ray, and electron beam resists
- - Michael Hatzakis
  - Kevin J. Stewart
  - et al.
- 1990
- Microelectronic Engineering
Silylation of resist materials using di- and polyfunctional organosilicon compounds
- - E. Babich
  - J. Paraszczak
  - et al.
- 1990
- Microelectronic Engineering
CW and time resolved luminescence study of dry etch damage in semiconductor wires
- - B.E. Maile
  - G. Mayer
  - et al.
- 1990
- Microelectronic Engineering