A Novel Graded Antireflective Coating with Built-in Hardmask Properties Enabling 65nm and Below CMOS Device Patterning
- K. Babich
- N. Fukiage
- et al.
- 2003
- IEDM 2003
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15 results at IEDM 2003
Threshold voltage control in NiSi-gated MOSFETs through silicidation induced impurity segregation (SIIS)
- Jakub Kedzierski
- Diane Boyd
- et al.
- 2003
- IEDM 2003
Investigation of Scaling Methodology for Strained Si n-MOSFETs Using a Calibrated Transport Model
- Hasan M. Nayfeh
- Judy L. Hoyt
- et al.
- 2003
- IEDM 2003
High Performance CMOS Fabricated on Hybrid Substrate with Different Crystal Orientations
- M. Yang
- M. Ieong
- et al.
- 2003
- IEDM 2003
Thousands of Microcantilevers for Highly Parallel and Ultra-dense Data Storage
- P. Vettiger
- T.R. Albrecht
- et al.
- 2003
- IEDM 2003