Detection of sub-design rule physical defects using E-beam inspection
- Oliver D. Patterson
- Julie Lee
- et al.
- 2013
- IEEE Trans Semicond Manuf
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Enabling scatterometry as an in-line measurement technique for 32 nm BEOL application
- M. Golam Faruk
- Shahin Zangooie
- et al.
- 2011
- IEEE Trans Semicond Manuf
Root-finding methods for assessing SRAM stability in the presence of random dopant fluctuations
- Rouwaida Kanj
- Zhuo Li
- et al.
- 2009
- IEEE Trans Semicond Manuf
Operational amplifier based test structure for quantifying transistor threshold voltage variation
- Brian L. Ji
- Dale J. Pearson
- et al.
- 2009
- IEEE Trans Semicond Manuf
Rigorous extraction of process variations for 65-nm CMOS design
- Wei Zhao
- Frank Liu
- et al.
- 2009
- IEEE Trans Semicond Manuf
Modeling and forecasting of defect-limited yield in semiconductor manufacturing
- Michael Baron
- Asya Takken
- et al.
- 2008
- IEEE Trans Semicond Manuf
Product yield prediction system and critical area database
- Thomas S. Barnett
- Jeanne P. Bickford
- et al.
- 2008
- IEEE Trans Semicond Manuf
Ring oscillator technique for MOSFET CV characterization
- Manjul Bhushan
- Mark B. Ketchen
- et al.
- 2008
- IEEE Trans Semicond Manuf
Design considerations for PD/SOI SRAM: Impact of gate leakage and threshold voltage variation
- Rouwaida Kanj
- Rajiv V. Joshi
- et al.
- 2008
- IEEE Trans Semicond Manuf
Decomposition and analysis of process variability using constrained principal component analysis
- Ongyeun Cho
- Daeik D. Kim
- et al.
- 2008
- IEEE Trans Semicond Manuf