Publications

176 results at JVSTA

Langmuir probe characterization of magnetron operation
- - H.R. Kaufman
  - S.M. Rossnagel
- 1986
- JVSTA
Solventiess polyimide films by vapor deposition
- - J.R. Salem
  - F.O. Sequeda
  - et al.
- 1986
- JVSTA
Reactive sputtering of copper and silicon near the sputtering threshold
- - T.M. Mayer
  - J.M.E. Harper
  - et al.
- 1985
- JVSTA
Summary Abstract: The interaction mechanism of inelastic electron tunneling spectroscopy probed by high resolution electron energy loss spectroscopy
- - M. Liehr
  - P.A. Thiry
  - et al.
- 1985
- JVSTA
Properties and Microelectronic Applications of Thin Films of Refractory Metal Nitrides
- - Marc Wittmer
- 1985
- JVSTA
Effects of biased cosputtering on resistivity and step coverage in tungsten silicide films
- - K.W. Choi
  - K.Y. Ahn
- 1985
- JVSTA
Photoemission spectroscopy study of aluminum-polyimide interface
- - J.W. Bartha
  - P.O. Hahrt
  - et al.
- 1985
- JVSTA
Summary Abstract: The origin of oxidation induced enhancement of Si⁺ sputter yield in SIMS
- - D.J. Vitkavage
  - J.G. Clabes
  - et al.
- 1985
- JVSTA
History of the modern cryopump
- - M.C. Bridwell
  - J.G. Rodes
- 1985
- JVSTA
Vibrations of CO chemisorbed on metal surfaces: Cluster model studies
- - W. Müller
  - P.S. Bagus
- 1985
- JVSTA