Frank Stem
C R C Critical Reviews in Solid State Sciences
This paper presents an overview of issues associated with Al dual damascene process technology. Different integration schemes are discussed and characteristics of metal fill, planarization and reliability are highlighted. Finally, a comparison is made between Al dual damascene, Al RIE, and Cu dual damascene.
Frank Stem
C R C Critical Reviews in Solid State Sciences
Mark W. Dowley
Solid State Communications
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Peter J. Price
Surface Science