Conference paper
Advanced optical test of an array an 65 nm CMOS technology
Franco Stellari, Peilin Song, et al.
ISTFA 2005
Conference paper
An overview of 300mm SOI starting wafer quality and its yield detractors
Abstract
A stringent sampling plan is developed to monitor and improve the quality of 300mm SOI (silicon on insulator) starting wafers procured from the suppliers. The ultimate goal is to obtain the defect free wafers for device fabrication and increase yield and circuit performance of the semiconductor integrated circuits. This paper presents various characterization techniques for QC monitor and examples of the typical defects attributed to wafer manufacturing processes. Copyright ©2005 ASM International®.