Conference paper
An optimal liner for copper damascene interconnects
D. Edelstein, C. Uzoh, et al.
ADMETA 2001
A device is presented that sweeps out programmable optical delays of 300 ps (or less) at 30 Hz, with shorter-delay scans possible at much higher rates. It is compact, vibration-free, linear to within 0.02%, and has a position repeatability of 1 part in 105. With this scanner and a PC-based signal-averaging data acquisition system, ultrafast autocorrelation measurements with very high signal/noise are demonstrated in both the fs and ps domains.
D. Edelstein, C. Uzoh, et al.
ADMETA 2001
S. Gates, A. Grill, et al.
ADMETA 2006
W. Cote, G. Costrini, et al.
VLSI Technology 1998
D. Edelstein, J. Heidenreich, et al.
IEDM 1997