Ultrathin Al2O3 and HfO2 gate dielectrics on surface-nitrided Ge
- James Jer-Hueih Chen
- Nestor A. Bojarczuk Jr.
- et al.
- 2004
- IEEE Transactions on Electron Devices
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118 results for Supratik Guha
Charge trapping studies on ultrathin ZrO 2 and HfO 2 high-k dielectrics grown by room temperature ultraviolet ozone oxidation
- Shriram Ramanathan
- Paul C. McIntyre
- et al.
- 2004
- Applied Physics Letters
Epitaxial silicon and germanium on buried insulator heterostructures and devices
- N.A. Bojarczuk
- M. Copel
- et al.
- 2003
- Applied Physics Letters
Thermodynamics and kinetics of room-temperature microstructural evolution in copper films
- C. Detavernier
- S.M. Rossnagel
- et al.
- 2003
- Journal of Applied Physics
Physical and electrical properties of reactive molecular-beam-deposited aluminum nitride in metal-oxide-silicon structures
- L.Å. Ragnarsson
- N.A. Bojarczuk
- et al.
- 2003
- Journal of Applied Physics
Growth and characterization of epitaxial Si/(LaxY1-x)2O3/Si heterostructures
- Vijay Narayanan
- Supratik Guha
- et al.
- 2002
- Journal of Applied Physics
Characterization of silicate/Si(001) interfaces
- M. Copel
- E. Cartier
- et al.
- 2002
- Applied Physics Letters
Interfacial oxide formation and oxygen diffusion in rare earth oxide-silicon epitaxial heterostructures
- V. Narayanan
- S. Guha
- et al.
- 2002
- Applied Physics Letters
High temperature stability of Al2O3 dielectrics on Si: Interfacial metal diffusion and mobility degradation
- S. Guha
- E. Gusev
- et al.
- 2002
- Applied Physics Letters
Impact of moisture on charge trapping and flatband voltage in Al 2O3 gate dielectric films
- Sufi Zafar
- A.C. Callegari
- et al.
- 2002
- Applied Physics Letters