Publications

221 results at Microelectronic Engineering

SiCGe ternary alloys - extending Si-based heterostructures
- - Subramanian S. Iyer
  - K. Eberl
  - et al.
- 1992
- Microelectronic Engineering
Understanding high numerical aperture optical lithography
- - D. Flagello
  - Alan E. Rosenbluth
  - et al.
- 1992
- Microelectronic Engineering
Positive mode silylation process characterization
- - D.C. La Tulipe
  - A.T.S. Pomerene
  - et al.
- 1992
- Microelectronic Engineering
Shallow junctions, silicide requirements and process technologies for sub 0.5 μm CMOS. Invited review paper
- - Bijan Davari
- 1992
- Microelectronic Engineering
Picosecond backside optical detection of internal signals in flip-chip mounted silicon VLSI circuits
- - H. Heinrich
  - N. Pakdaman
  - et al.
- 1992
- Microelectronic Engineering
Optical analysis of wet chemically etched InGaAs/InP wires
- - B. Jacobs
  - M. Emmerling
  - et al.
- 1992
- Microelectronic Engineering
Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering
Device design issues for a high-performance technology with Si or SiGe epitaxial base
- - J.N. Burghartz
  - J.D. Cressler
  - et al.
- 1991
- Microelectronic Engineering
Light scattering properties of x-ray lithography mask substrates
- - J.R. Maldonado
  - Y. Vladimirsky
  - et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering