Dielectric anisotropy of BPDA-PDA polyimide and its effect on electrical characteristics of interconnects

A. Deutsch; M. Swaminathan; M. Ree; C. Surovic; G. Arjavalingam; K. Prasad; D. McHerron; M. McAlister; G.V. Kopcsay; A.P. Giri; E.D. Perfecto; G.E. White

doi:10.1109/EPEP.1993.394567

IEEE Topical Meeting EPEPS 1993

Conference paper

20 Oct 1993

Dielectric anisotropy of BPDA-PDA polyimide and its effect on electrical characteristics of interconnects

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Abstract

The dielectric anisotropy of BPDA-PDA polyimide is characterized in a multi-layer thin-film structure representative of its actual use. The results are verified through their effect on signal propagation and crosstalk.

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