Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
High resolution x-ray photoemission spectra of the alkali halides LiF, NaF, NaCl, NaBr, NaI, KF, KCl, KBr, and KI are reported. The valence-band spectra are compared with previous spectra of group-IV,-III-V, and -II-VI crystals. It is shown that features of the spectra evolve systematically in proceeding from the group-IV elements to the I-VII crystals. Analysis of this evolution leads to the interpretation of the structure of the outermost halogen p band in the less ionic cases as being due to band effects rather than spin-orbit splitting. The outermost-core-level binding energies are tabulated. Intrinsic and extrinsic satellite structure associated with the core levels is discussed. © 1974 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
A. Krol, C.J. Sher, et al.
Surface Science
M. Hargrove, S.W. Crowder, et al.
IEDM 1998