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Jim Bucchignano- D. Fried
- J. Hergenrother
- et al.
- 2004
- IEDM 2004
- P. Solomon
- K.W. Guarini
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- 2003
- IEEE Circuits and Devices Magazine
- Karen Petrillo
- David Medeiros
- et al.
- 2002
- SPIE Photomask Technology 2002
- 2002
- Applied Physics Letters
- K.W. Guarini
- P. Solomon
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
- David R. Medeiros
- Karen E. Petrillo
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
- Y. Lu
- P.L. Trouilloud
- et al.
- 1999
- Journal of Applied Physics
- Karen Petrillo
- James Bucchignano
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures