Subramanian S. Iyer, G.L. Patton, et al.
Thin Solid Films
Subramanian S. Iyer, G.L. Patton, et al.
Thin Solid Films
K. Schonenberg, Siu-Wai Chan, et al.
Journal of Materials Research
G.L. Patton, D.L. Harame, et al.
VLSI Technology 1989
A. Grill, B.S. Meyerson, et al.
Journal of Materials Research